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The Precision Positioning Table Series has been created through a combination of precision machining technology and electronics. The result is a precision positioning table which consists of a direct-acting series, along with a ball screw or motor, incorporated between a bed and a slide table. The series ranges widely, from a module type table to a high-precision version. |
The Precision Positioning Table Series is used as the positioning mechanism for a variety of applications, from semiconductor manufacturing equipment or flat panel display manufacturing equipment, to precision equipment. Using this positioning table or electrical equipment for your control needs contributes to an overall reduction in the man-hours required for design and assembly. |
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| Ball Screw Drive |
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• Precision Positioning Table TU
• Long Stroke Precision Positioning Table L
• High Rigidity Series LH
• Super Precision Positioning Table TX
• Cleanroom Precision Positioning Table TC
• Precision Positioning Table MA/MS
• Compact Series TS/CT
• Micro Precision Positioning Table TM
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| Linear Motor Drive |
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• Linear Motor Table LT | Linear Motor Table LT...M
• Nano Linear NT | Nano Linear NT...V
• Nano Linear NT...H | Nano Linear NT...XZ |
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| Others |
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• Belt Driven Series TSLB
• Precision Rotary Table RT
• Precision Alignment Table AT
• Alignment Stage Module Type SA...M
• Alignment Stage Direct Drive Type SA...D
• Precision Elevating Table TZ
• Piezo Stage SP
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